Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry-Reference-Cited by-同舟云学术

Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry

Published:2021-01-29 Issue:5 Volume:7 Page:
ISSN:2375-2548
Container-title:Science Advances
language:en
Short-container-title:Sci. Adv.

Author:

Tanksalvala Michael¹^ORCID,Porter Christina L.¹^ORCID,Esashi Yuka¹^ORCID,Wang Bin¹,Jenkins Nicholas W.¹^ORCID,Zhang Zhe¹,Miley Galen P.²^ORCID,Knobloch Joshua L.¹^ORCID,McBennett Brendan¹^ORCID,Horiguchi Naoto³^ORCID,Yazdi Sadegh⁴^ORCID,Zhou Jihan¹⁵,Jacobs Matthew N.¹^ORCID,Bevis Charles S.¹^ORCID,Karl Robert M.¹^ORCID,Johnsen Peter¹,Ren David¹⁶^ORCID,Waller Laura¹⁶^ORCID,Adams Daniel E.¹^ORCID,Cousin Seth L.⁷,Liao Chen-Ting¹^ORCID,Miao Jianwei¹⁵^ORCID,Gerrity Michael¹^ORCID,Kapteyn Henry C.¹⁷^ORCID,Murnane Margaret M.¹

Affiliation:

1. STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.

2. Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA.

3. Imec, Kapeldreef 75, 3001 Leuven, Belgium.

4. Renewable and Sustainable Energy Institute (RASEI), University of Colorado, Boulder, CO 80309, USA.

5. Department of Physics and Astronomy and California NanoSystem Institute, University of California, Los Angeles, CA 90095, USA.

6. Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, USA.

7. KMLabs Inc., 4775 Walnut St. #102, Boulder, CO 80301, USA.

Abstract

A new imaging technique enables nondestructive, 3D characterization of nanostructures, their composition, and interfaces.

Funder

NSF Office of the Director

Gordon and Betty Moore Foundation

Defense Sciences Office, DARPA

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

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