Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement-Reference-Cited by-同舟云学术

Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement

Published:2018-10-30 Issue:31 Volume:57 Page:9455
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Lv Qiang,Liu Zhaowu^ORCID,Wang Wei,Li Xiaotian,Li Shuo,Song Ying,Yu Hongzhu,Bayanheshig ,Li Wenhao

Funder

National Natural Science Foundation of China (NSFC)

Jilin Province ScienceTechnology Development Program Project in China

Chinese Academy of Sciences (CAS)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference25 articles.

1. Ultrafast laser processing of materials: from science to industry

2. Liquid deposition photolithography for submicrometer resolution three-dimensional index structuring with large throughput

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5. Precise measurement of curvature radius for spherical mirror with large aperture

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