IDM-Assisted Capacitive Displacement Sensor for Large-Range, High-Precision Positioning Systems
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Published:2023
Issue:
Volume:
Page:1-11
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ISSN:0278-0046
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Container-title:IEEE Transactions on Industrial Electronics
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language:
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Short-container-title:IEEE Trans. Ind. Electron.
Author:
Fan Kai1ORCID,
Shi Ruiqi1ORCID,
Feng Zhihua1ORCID
Affiliation:
1. Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, University of Science and Technology of China, Hefei, China
Funder
National Natural Science Foundation of China
National Key R&D Program of China
Strategic Priority Research Program (C) of the CAS
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Control and Systems Engineering
Cited by
1 articles.
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