Short period La/B and LaN/B multilayer mirrors for ~68 nm wavelength-Reference-Cited by-同舟云学术

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Short period La/B and LaN/B multilayer mirrors for ~68 nm wavelength

Published:2013-11-26 Issue:24 Volume:21 Page:29894
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Makhotkin Igor A.,Zoethout Erwin,van de Kruijs Robbert,Yakunin Sergey N.,Louis Eric,Yakunin A. M.,Banine V.,Müllender S.,Bijkerk Fred

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference18 articles.

1. Status of small d-spacing x-ray multilayers development at Osmic

2. Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics

3. Multilayer X-ray mirrors based on La/B4C and La/B9C

4. Spectral properties of La/B - based multilayer mirrors near the boron K absorption edge

5. Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography

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1. Multifitting 2: software for reflectometric, off-specular and grazing-incidence small-angle scattering analysis of multilayer nanofilms;Journal of Applied Crystallography;2024-04-26

2. 6.X nm下一代极紫外多层膜技术研究进展;Chinese Journal of Lasers;2024

3. Effect of low nitrogen concentration on reactive RF sputtering of boron;Vacuum;2024-01

4. Interface Variations of La/B4c Multilayers with Increasing Period Number;2024

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