Overcoming Si_3N_4 film stress limitations for high quality factor ring resonators-Reference-Cited by-同舟云学术

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Overcoming Si_3N_4 film stress limitations for high quality factor ring resonators

Published:2013-09-20 Issue:19 Volume:21 Page:22829
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Luke Kevin,Dutt Avik,Poitras Carl B.,Lipson Michal

Funder

Air Force Office of Scientific Research (AFOSR)

Defense Advanced Research Projects Agency (DARPA)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference18 articles.

1. Optical interconnects to silicon

2. On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions

3. The Past, Present, and Future of Silicon Photonics

4. Microresonator-Based Optical Frequency Combs

5. CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects

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