Optimization of diffraction grating profiles in fabrication by electron-beam lithography
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Publisher
The Optical Society
Reference15 articles.
1. Continuous profile writing by electron and optical lithography
2. Electron-beam resist edge profile simulation
3. Phase holograms in polymethyl methacrylate
4. Measuring and modeling the proximity effect in direct-write electron-beam lithography kinoforms
5. Fabrication of monolithic diffractive optical elements by the use of e-beam direct write on an analog resist and a single chemically assisted ion-beam-etching step
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