Implementation of atomic layer deposited AZO films in SLM structures

Abstract

Here, we demonstrate the implementation of transparent conductive aluminum-doped zinc oxide (AZO) thin films deposited on glass substrate (AZO/glass) by the atomic layer deposition technique in liquid crystal (LC) spatial light modulator (SLM) devices. Structural, optical, and electrical properties as well as surface free energy reveal the high quality and uniformity of deposited AZO layers. We present two types of structures that highlight the multifunctional role of AZO thin films in SLM configurations: (i) as a transparent conductive layer for assembling regular antiparallel LC cells and (ii) as a transparent conductive layer and alignment layer allowing vertical alignment in LC display devices. A comparison of the electro-optical parameters such as pre-tilt angle, phase modulation, driving voltage, and response time of both devices is presented and discussed. AZO thin films prove superior performance, indicating a growing demand for the next generation indium tin oxide-free technology, including advanced display devices and dynamic flat-panel functionalities.