Newton ring interferometry application for 2D lens array alignment with micrometer accuracy

Abstract

The dense packing of two-dimensional (2D) lens arrays with high tilt and decentration accuracies is a technological challenge in coherent beam combining, as the collimator lens parameters and 2D lens array alignment must satisfy stringent requirements. A method for 2D lens array alignment based on Newton ring interferometry (NRI) is proposed. The analytical model and the algorithm presented in this study enabled the estimation of alignment sensitivity. An optical setup for alignment tests using NRI was developed and experimentally verified, and micrometer sensitivity was demonstrated. Analytical and experimental results showed that micrometer accuracy was achieved. Its limitations and prospects for improvement are also discussed.