Etching rate enhancement by shaped femtosecond pulse train electron dynamics control for microchannels fabrication in fused silica glass
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference22 articles.
1. The origins and the future of microfluidics
2. Simultaneous multi-microhole drilling of soda-lime glass by water-assisted ablation with femtosecond laser pulses
3. High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecond pulse trains
4. High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams
5. Fabrication of microfluidic devices in silica glass by water-assisted ablation with femtosecond laser pulses
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3. Optimization of fs + ps double-pulse sequence parameters for laser-assisted chemical etching of microchannels in fused silica;Journal of Physics D: Applied Physics;2023-04-21
4. Polarization-independent microchannel in a high-speed-scan femtosecond laser-assisted etching of fused silica;Applied Optics;2023-01-03
5. Ultrafast laser direct drilling of high aspect ratio microchannels in fused silica: Insights on channel self-termination mechanisms;Optics & Laser Technology;2023-01
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