Nanopatterning of atomic layer deposited Al:ZnO films using electron beam lithography for waveguide applications in the NIR region
Author:
Publisher
The Optical Society
Subject
Electronic, Optical and Magnetic Materials
Reference16 articles.
1. Low-Loss Plasmonic Metamaterials
2. Highly efficient p-i-n-type organic light emitting diodes on ZnO:Al substrates
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