Nanometer-scale displacement sensor based on phase-sensitive diffraction grating
Author:
Publisher
The Optical Society
Reference15 articles.
1. Analysis and design of an interdigital cantilever as a displacement sensor
2. Nanometre-scale displacement sensing using a single electron transistor
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4. Multimode interference-based fiber-optic displacement sensor
5. Displacement sensing using evanescent tunneling between guided resonances in photonic crystal slabs
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