Abstract
We study the surface morphology, optical absorption (400–1100 nm), and carrier lifetime of black silicon fabricated by femtosecond (fs) laser in air. We explore a large laser parameter space, for which we adopt a single parameter ξ to describe the cumulative fluence delivered to the sample. We also study the laser-oxidized surface layer by measuring its photoluminescence spectra and comparing its effect on the aforementioned properties. Our study in a broad range of ξ is instructive in choosing laser parameters when targeting different applications.
Funder
Business Finland
Academy of Finland
European Metrology Programme for Innovation and Research
Subject
Atomic and Molecular Physics, and Optics
Cited by
2 articles.
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