Absolute distance measurement using sinusoidal phase modulating frequency sweeping interferometry with a reference interferometer

Abstract

Frequency sweeping interferometry with reference interferometer based on sinusoidal phase modulating technique is proposed in this paper for absolute distance measurement. With the frequency of the external cavity diode laser (ECDL) swept continuously in sinusoidal, a HeNe laser was employed to monitor the drifts of the target and the reference length, and influences caused by drifts during the measurement were compensated in real time. Sinusoidal phase modulation with non-overlapping frequencies were applied to the two laser lights individually by two electro-optic modulators (EOM), and the interference phases corresponding to the two laser lights were extracted simultaneously using the phase generated carrier (PGC) demodulation based on frequency-division multiplex technique. Performance of the phase detection method has been verified by nanometer displacement measurements. Experimental results show that the measurement uncertainty can be considerably reduced by compensating the influences of drifts and by applying linear regression to get the ratio of interference phase changes between the measurement interferometer and the reference interferometer. Comparison of the absolute distance measurement with an incremental interferometer yields a measurement uncertainty of 10−5, which is in good agreement with the estimation of the measurement uncertainty.