Full-field analysis of wavefront errors in point diffraction interferometer with misaligned Gaussian incidence
Author:
Funder
National Natural Science Foundation of China
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference13 articles.
1. Development of the point diffraction interferometer for extreme ultraviolet lithography: Design, fabrication, and evaluation
2. Visible light point-diffraction interferometer for testing of EUVL optics
3. Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces
4. Measurement of aspheric surface combining point diffraction interferometry and annular subaperture stitching
5. Evaluation of the sphericity measurement uncertainty for the fiber point diffraction interferometer
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