Image lithography in telluride suboxide thin film through controlling “virtual” bandgap-Reference-Cited by-同舟云学术

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Image lithography in telluride suboxide thin film through controlling “virtual” bandgap

Published:2016-12-23 Issue:1 Volume:5 Page:22
ISSN:2327-9125
Container-title:Photonics Research
language:en
Short-container-title:Photon. Res.

Author:

Wei Tao,Wei Jingsong,Zhang Kui,Zhang Long

Funder

National Natural Science Foundation of China (NSFC)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. Continuous-tone grayscale mask fabrication using high-energy-beam-sensitive glass

2. Grayscale photomask fabricated by laser direct writing in metallic nano-films

3. Chalcogenide glass e-beam and photoresists for ultrathin grayscale patterning

4. Chalcogenide phase-change thin films used as grayscale photolithography materials

5. Micro-optical elements fabricated by metal-transparent-metallic-oxides grayscale photomasks

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1. High-precision defocus detection through a bevel-axial stripe pattern projection method;Applied Optics;2024-09-12

2. Etching and Compositional Ratio Effect on the Surface Properties of Bismuth Telluride Thin Films;Surfaces;2024-03-15

3. Offense‐Defense‐Balanced Strategy Escorting Tellurium Oxidation Conversion towards Energetic and Long‐Life Zn Batteries;Advanced Energy Materials;2023-12-21

4. Defocusing detection of high-speed imaging for samples with arbitrary pattern structures;Thirteenth International Conference on Information Optics and Photonics (CIOP 2022);2022-12-15

5. Improving the Efficiency of Gallium Telluride for Photocatalysis, Electrocatalysis, and Chemical Sensing through Defects Engineering and Interfacing with its Native Oxide;Advanced Functional Materials;2022-08-07

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