Precision PGC demodulation for homodyne interferometer modulated with a combined sinusoidal and triangular signal-Reference-Cited by-同舟云学术

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Precision PGC demodulation for homodyne interferometer modulated with a combined sinusoidal and triangular signal

Published:2018-02-14 Issue:4 Volume:26 Page:4818
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Yan Liping,Chen Zhouqiang,Chen Benyong,Xie Jiandong,Zhang Shihua,Lou Yingtian,Zhang Enzheng

Funder

National Natural Science Foundation of China (NSFC)

Natural Science Foundation of Zhejiang Province

Program for Changjiang Scholars and Innovative Research Team in University

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference27 articles.

1. Recent developments and challenges of nanopositioning and nanomeasuring technology

2. Development of a laser synthetic wavelength interferometer for large displacement measurement with nanometer accuracy

3. Advances in Large-Scale Metrology – Review and future trends

4. Comparison of the performance of the next generation of optical interferometers

5. Toward a nonlinearity model for a heterodyne interferometer: not based on double-frequency mixing

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4. High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer;Photonics Research;2024-05-01

5. A PGC demodulation scheme based on the Lissajous ellipse fitting for homodyne interferometer without using second harmonic carrier signal;Applied Acoustics;2024-05

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