Debris-free EUVL sources based on gas jets

Abstract

Supersonic gas jets are used to produce a source of large cluster laser plasma targets for extreme ultraviolet (EUV) generation without direct production of debris. EUV conversion efficiency measurements at a wavelength of 13.5 nm yield 58% of a solid gold target or 0.0026 J/eV/JL. Multilayer-coated mirrors placed in proximity to the plasma exhibit 14% reflectance loss after the equivalent of 1.4 × 108 pulses, an improvement by a factor of 105× over unprotected solid target results and 100× over solid targets with extensive debris mitigation.