Mass-limited laser-plasma cryogenic target for 13-nm point x-ray sources for lithography
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SPIE
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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2. Spectroscopy of highly charged ions and its relevance to EUV and soft x-ray source development;Journal of Physics B: Atomic, Molecular and Optical Physics;2015-05-28
3. Stabilized droplet target delivery for high power EUV generation for lithography;LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings;2007-10
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