Arbitrary trapezoidal illumination generation method based on variable slits for optical lithography-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Arbitrary trapezoidal illumination generation method based on variable slits for optical lithography

Published:2018-04-04 Issue:11 Volume:57 Page:2827
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Lin Dongliang,Zhang Fang,Cheng Weilin,Huang Huijie

Funder

International Science & Technology Cooperation Program of China

International Science & Technology Cooperation Program of Shanghai

Youth Innovation Promotion Association of the Chinese Academy of Sciences

Science and Technology Commission of Shanghai Municipality (STCSM)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference20 articles.

1. Principles of Lithography

2. Design of illumination system for ArF excimer laser step-and-scanner

3. Reducing the stray light of holographic gratings by shifting the substrate a short distance in the direction parallel or perpendicular to the exposure interference fringes

4. Impact of local partial coherence variations on exposure tool performance

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and optimization of top-Gaussian illumination field in photolithography;Optical Engineering;2021-02-26

2. Configuration design for the variable pupil shaping unit of a photolithography machine;Applied Optics;2020-04-09

3. Telecentricity measurement for exposure system of photolithography tools;Optical Engineering;2020-03-18

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP