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Terahertz broadband anti-reflection moth-eye structures fabricated by femtosecond laser processing

  • Published:2019-09-12 Issue:9 Volume:2 Page:2764
  • ISSN:2578-7519
  • Container-title:OSA Continuum
  • language:en
  • Short-container-title:OSA Continuum

Author:

Sakurai Haruyuki,Nemoto Natsuki,Konishi Kuniaki,Takaku Ryota,Sakurai Yuki,Katayama Nobuhiko,Matsumura Tomotake,Yumoto Junji,Kuwata-Gonokami Makoto

Funder

Ministry of Education, Culture, Sports, Science and Technology

Center of Innovation Program

New Energy and Industrial Technology Development Organization

Publisher

The Optical Society

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Cited by 21 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. GHz burst pumped third-harmonic pulses for precise microfabrication of silicon;Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX;2024-03-12

2. Fabrication of THz metalens by ultraviolet femtosecond laser ablation;Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVII;2024-03-11

3. An all-silicon design of a high-efficiency broadband transmissive terahertz polarization convertor;Frontiers of Optoelectronics;2023-12-06

4. Advances in fabrication of micro-optical components by femtosecond laser with etching technology;Optics & Laser Technology;2023-12

5. Laser processing of silicon with GHz burst pumped third harmonics for precise microfabrication;Optics Express;2023-11-16
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