Tailoring diffraction-induced light distribution toward controllable fabrication of suspended C-MEMS-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Tailoring diffraction-induced light distribution toward controllable fabrication of suspended C-MEMS

Published:2012-07-12 Issue:15 Volume:20 Page:17126
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Long Hu,Xi Shuang,Liu Dan,Shi Tielin,Xia Qi,Liu Shiyuan,Tang Zirong

Funder

National Science Foundation of China

National Key Basic Research Special Fund of China

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference18 articles.

1. A novel method for the fabrication of high-aspect ratio C-MEMS structures

2. Electrical Properties and Shrinkage of Carbonized Photoresist Films and the Implications for Carbon Microelectromechanical Systems Devices in Conductive Media

3. Lithographically Defined Porous Carbon Electrodes

4. C-MEMS for the Manufacture of 3D Microbatteries

5. Integration of Carbon Nanotubes to C-MEMS for On-chip Supercapacitors

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thermal stress-induced fabrication of carbon micro/nanostructures and the application in high-performance enzyme-free glucose sensors;Sensors and Actuators B: Chemical;2021-10

2. Wafer-scale on-chip synthesis and field emission properties of vertically aligned boron nitride based nanofiber arrays;Applied Physics Letters;2019-03-04

3. One-Step Mask-Based Diffraction Lithography for the Fabrication of 3D Suspended Structures;Nanoscale Research Letters;2018-12

4. Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review;Journal of Micromechanics and Microengineering;2015-09-25

5. Carbon as a MEMS Material;Materials and Failures in MEMS and NEMS;2015-09-19

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3