Simultaneous temperature and pressure sensing based on a single optical resonator

Abstract

We propose a dual-parameter sensor for the simultaneous detection of temperature and pressure based on a single packaged microbubble resonator (PMBR). The ultrahigh-quality (∼107) PMBR sensor exhibits long-term stability with the maximum wavelength shift about 0.2056 pm. Here, two resonant modes with different sensing performance are selected to implement the parallel detection of temperature and pressure. The temperature and pressure sensitivities of resonant Mode-1 are -10.59 pm/°C and 0.1059 pm/kPa, while the sensitivities of Mode-2 are -7.69 pm/°C and 0.1250 pm/kPa, respectively. By adopting a sensing matrix, the two parameters are precisely decoupled and the root mean square error of measurement are ∼ 0.12 °C and ∼ 6.48 kPa, respectively. This work promises the potential for the multi-parameters sensing in a single optical device.