Production of ultra-steep dichroic filters with broad band optical monitoring

Abstract

The feasibility of using direct broad band optical monitoring control in the fabrication of the ultra-steep dichroic filters based on resonant structures is investigated. Using computational manufacturing and deposition experiments, the role of the errors self-compensation effect is clarified by comparing the results of direct broad band optical monitoring and time monitoring. The errors correlation strength of ultra-steep dichroic filter is analyzed and it shows that the correlation calculated by the current model is not strong. The relationship between errors correlation and errors self-compensation effect for the ultra-steep dichroic filter is discussed.