Affiliation:
1. Tongji University
2. Lomonosov Moscow State University
Abstract
The feasibility of using direct broad band optical monitoring control in the fabrication of the ultra-steep dichroic filters based on resonant structures is investigated. Using computational manufacturing and deposition experiments, the role of the errors self-compensation effect is clarified by comparing the results of direct broad band optical monitoring and time monitoring. The errors correlation strength of ultra-steep dichroic filter is analyzed and it shows that the correlation calculated by the current model is not strong. The relationship between errors correlation and errors self-compensation effect for the ultra-steep dichroic filter is discussed.
Funder
National Natural Science Foundation of China
Shanghai Municipal Education Commission
Russian Science Foundation
Subject
Atomic and Molecular Physics, and Optics
Cited by
5 articles.
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