On the choice of monitoring procedure of optical coating deposition-Reference-Cited by-同舟云学术

On the choice of monitoring procedure of optical coating deposition

Published:2023-12-19 Issue:№6_2023 Volume: Page:2360105–1-2360105–7
ISSN:0579-9392
Container-title:Seriya 3: Fizika, Astronomiya
language:
Short-container-title:VMU

Author:

Tikhonravov A. V.¹,Lagutina A. A.¹,Lagutin Yu. S.¹,Lukyanenko D. V.¹,Sharapova S. A.¹,Sharov A. N.²,Yagola A. G.¹

Affiliation:

1. Research Computing Center, Lomonosov Moscow State University

2. 3Shenzhen MSU-BIT University, Faculty of Computational Mathematics and Cybernetics P.R. China

Abstract

Theoretical results are formulated to assess the strength of the effect of self-compensation of errors in the thicknesses of layers of multilayer optical coatings. They are applicable to any method of optical monitoring of the deposition process. It is shown that considering a possible presence of a strong error self-compensation effect is of great importance for choosing a monitoring method. A comparative analysis of the results obtained to date to assess the strength of the error self-compensation effect for various types of coatings has been carried out. Moreover, a number of results were obtained for the first time directly in this work. The results obtained can be used to select the optimal method for monitoring the deposition process depending on the type of coating.

Funder

Russian Science Foundation

Publisher

Moscow University Press

Subject

Space and Planetary Science,General Physics and Astronomy,Astronomy and Astrophysics

Reference18 articles.

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