Adaptive high-resolution Linnik interferometry for 3D measurement of microparticles-Reference-Cited by-同舟云学术

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Adaptive high-resolution Linnik interferometry for 3D measurement of microparticles

Published:2019-07-11 Issue:14 Volume:44 Page:3550
ISSN:0146-9592
Container-title:Optics Letters
language:en
Short-container-title:Opt. Lett.

Author:

Allendorf Benedikt,Käkel Eireen,Ha Uh-Myong,Hagemeier Sebastian,Hillmer Hartmut,Lehmann Peter

Funder

Deutsche Forschungsgemeinschaft (DFG)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference14 articles.

1. High-speed noncontact profiler based on scanning white-light interferometry

2. Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain

3. Atomic and subnanometer resolution in ambient conditions by atomic force microscopy

4. Valve cone measurement using white light interference microscopy in a spherical measurement geometry

5. Fringe modulation skewing effect in white-light vertical scanning interferometry

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1. Investigation of measurement data of low-coherence interferometry at tilted surfaces in the 3D spatial frequency domain;tm - Technisches Messen;2022-03-22

2. Analysis of interference microscopy in the spatial frequency domain;Journal of Physics: Photonics;2021-01-01

3. Microsphere-assisted interferometry with high numerical apertures for 3D topography measurements;Applied Optics;2020-02-14

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