Scanning white-light interferometry with a supercontinuum source
Author:
Funder
Academy of Finland
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference23 articles.
1. Mirau correlation microscope
2. Three-dimensional sensing of rough surfaces by coherence radar
3. Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry
4. Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
5. MEMS profilometry by low coherence phase shifting interferometry: Effect of the light spectrum for high precision measurements
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