Novel 3D SEM Moiré method for micro height measurement
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference28 articles.
1. Moiré: Formation and interpretation
2. Electron beam moiré
3. Experimental study of moiré method in laser scanning confocal microscopy
4. Microcreep deformation measurements by a moire method using electron beam lithography and electron beam scan
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