Silicon Photonics: silicon nitride versus silicon-on-insulator
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OSA
Reference23 articles.
1. Low-Loss Singlemode PECVD Silicon Nitride Photonic Wire Waveguides for 532–900 nm Wavelength Window Fabricated Within a CMOS Pilot Line
2. CMOS compatible monolithic multi-layer Si_3N_4-on-SOI platform for low-loss high performance silicon photonics dense integration
3. Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths
4. Silicon oxynitride planar waveguiding structures for application in optical communication
5. Large-scale integrated optics using TriPleX waveguide technology: from UV to IR
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