Mask-less ultraviolet photolithography based on CMOS-driven micro-pixel light emitting diodes-Reference-Cited by-同舟云学术

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Mask-less ultraviolet photolithography based on CMOS-driven micro-pixel light emitting diodes

Published:2009-12-08 Issue:26 Volume:17 Page:23522
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Elfström D.,Guilhabert B.,McKendry J.,Poland S.,Gong Z.,Massoubre D.,Richardson E.,Rae B. R.,Valentine G.,Blanco-Gomez G.,Gu E.,Cooper J. M.,Henderson R. K.,Dawson M. D.

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference18 articles.

1. Light-Directed, Spatially Addressable Parallel Chemical Synthesis

2. Laser scanner for direct writing lithography

3. Maskless photolithography using UV LEDs

4. Versatile maskless microscope projection photolithography system and its application in light-directed fabrication of DNA microarrays

5. Spatial light modulator for maskless optical projection lithography

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4. MicroLED/LED electro-optical integration techniques for non-display applications;Applied Physics Reviews;2023-05-01

5. Micro light-emitting diodes;Nature Electronics;2022-09-22

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