Improving crystallinity of femtosecond-laser hyperdoped silicon via co-doping with nitrogen-Reference-Cited by-同舟云学术

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Improving crystallinity of femtosecond-laser hyperdoped silicon via co-doping with nitrogen

Published:2016-03-23 Issue:4 Volume:6 Page:1321
ISSN:2159-3930
Container-title:Optical Materials Express
language:en
Short-container-title:Opt. Mater. Express

Author:

Sun Haibin,Liang Cong,Feng Guojin,Zhu Zhen,Zhuang Jun,Zhao Li

Funder

China Academy of Engineering Physics (CAEP)

National Basic Research Program of China (973 Program)

National Natural Science Foundation of China (NSFC)

Publisher

The Optical Society

Subject

Electronic, Optical and Magnetic Materials

Reference30 articles.

1. Microstructuring of silicon with femtosecond laser pulses

2. Silicon Surface Morphologies after Femtosecond Laser Irradiation

3. Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon

4. A nitrogen-hyperdoped silicon material formed by femtosecond laser irradiation

5. Studying femtosecond-laser hyperdoping by controlling surface morphology

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1. Light and gas dual-function detection and mutual enhancement based on hyperdoped black silicon;Optics Express;2024-03-26

2. Hyperdoping-regulated room-temperature NO2 gas sensing performances of black silicon based on lateral photovoltaic effect;Sensors and Actuators B: Chemical;2023-05

3. Mid-long wavelength infrared absorptance of hyperdoped silicon via femtosecond laser microstructuring;Optics Express;2022-01-06

4. Ultrafast laser-induced black silicon, from micro-nanostructuring, infrared absorption mechanism, to high performance detecting devices;Materials Today Nano;2020-08

5. Enhanced responsivity of co-hyperdoped silicon photodetectors fabricated by femtosecond laser irradiation in a mixed SF6/NF3 atmosphere;Journal of the Optical Society of America B;2020-02-13

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