Robust five-degree-of-freedom measurement system with self-compensation and air turbulence protection

Abstract

A robust five-degree-of-freedom (5-DOF) measurement system is proposed in this paper. The compact optical configuration with high resolution is designed based on lens combination and multiple reflections. Beam drift and dual-beam parallelism are monitored and compensated by autocollimator units and a polarizer unit respectively. In addition, a protection method is proposed to reduce the intensity of air turbulence by reducing the Reynolds number of the beam path. The performance of the system is verified by experiments. The experimental results show that the self-compensation methods and air turbulence protection can effectively improve the accuracy and stability of the system under the long-term interference of external environments. The proposed system has high precision, desirable robustness, and convenient pre-calibration, which can be used for error measurement of precision machines.