UV spectral filtering by surface structured multilayer mirrors-Reference-Cited by-同舟云学术

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UV spectral filtering by surface structured multilayer mirrors

Published:2014-02-21 Issue:5 Volume:39 Page:1185
ISSN:0146-9592
Container-title:Optics Letters
language:en
Short-container-title:Opt. Lett.

Author:

Huang Qiushi,Paardekooper Daniel Mathijs,Zoethout Erwin,Medvedev V. V.,van de Kruijs Robbert,Bosgra Jeroen,Louis Eric,Bijkerk Fred

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference22 articles.

1. Physical processes in EUV sources for microlithography

2. Review on the solar spectral variability in the EUV for space weather purposes

3. Source of coherent kiloelectronvolt X-rays

4. Lithography gets extreme

5. Laser-produced plasma source system development

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3. First principles study on the structures and properties of SnO–ZnO alloys under high pressure;Materials Science in Semiconductor Processing;2022-06

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