Surface optical coatings by ion assisted deposition techniques: study of uniformity
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Publisher
The Optical Society
Reference11 articles.
1. Ion-beam-assisted deposition of thin films
2. Refractive indices of TiO_2 films produced by reactive evaporation of various titanium–oxygen phases
3. Morphology and structure of TiO2 thin layers vs. thickness and substrate temperature
4. In situ and air index measurements: influence of the deposition parameters on the shift of TiO_2/SiO_2 Fabry-Perot filters
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3. Optical and Mechanical Property Changes in Thin-Film Filters with Post Deposition Thermal Treatments;Japanese Journal of Applied Physics;2006-03-08
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5. Change of Refractive Index and Residual Stresses of Ta2O5Thin Film Prepared by Dual Ion Beam Sputtering Deposition as the Substrate Temperature and Assist ion Beam Energy;Journal of the Korean Ceramic Society;2005-01-01
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