Affiliation:
1. Faculty of Physics, Lomonosov Moscow State University
Abstract
It is generally accepted that turning point optical monitoring provides
a very strong error self-compensation effect when used to control the
deposition of narrow bandpass filters with quarter-wave or
multiple-quarter-wave layer optical thicknesses. However, how strong
this effect is has never been assessed before, to our knowledge. A
recently developed general approach to estimating the strength of
thickness error correlation and the strength of the associated error
self-compensation effect allows, possibly for the first time, such an
assessment. In this work, it is proved that, indeed, in the case of
monitoring narrowband filters, the latter effect has enormous
strength, many times greater than the strength of the error
self-compensation effects when manufacturing all other types of
optical coatings using various monochromatic and broadband monitoring
techniques.
Funder
Russian Science Foundation
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Cited by
4 articles.
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