High-precision system for automatic null ellipsometric measurement-Reference-Cited by-同舟云学术

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High-precision system for automatic null ellipsometric measurement

Published:2002-08-01 Issue:22 Volume:41 Page:4536
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Zhu Henian,Liu Liguo,Wen Yiwu,Lü Zhengde,Zhang Baizhe

Publisher

The Optical Society

Reference2 articles.

1. Minimization of errors in ellipsometric measurements

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration;Chinese Journal of Lasers;2019

2. Fast ellipsometric measurements based on a single crystal photo-elastic modulator;Optics Express;2010-09-23

3. Automatic null ellipsometry with an interferometer;Applied Optics;2009-11-05

4. Unified analysis and mathematical representation of film-thickness behavior of film-substrate systems;Applied Optics;2006-01-10

5. Closed-form inversion of the reflection ellipsometric function of a film–substrate system: absorbing-substrate optical constant;Journal of the Optical Society of America A;2005-08-01

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