Unified analysis and mathematical representation of film-thickness behavior of film-substrate systems
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Publisher
The Optical Society
Reference21 articles.
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2. Single-instrument morphology: single-element polarizer (SEP) ellipsometers, reflecsometers, elliptometers, and reflectometers;SPIE Proceedings;2014-05-21
3. Real-time combined reflection and transmission ellipsometry for film-substrate systems;SPIE Proceedings;2013-09-27
4. Single-angle-of-incidence single-element rotating-polarizer (Single SERP) ellipsometer for film-substrate systems;SPIE Proceedings;2013-09-27
5. Transmission ellipsometry on unsupported film/pellicle: closed-form inversion;Polarization Science and Remote Sensing III;2007-09-13
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