Systematic errors on curved microstructures caused by aberrations in confocal surface metrology-Reference-Cited by-同舟云学术

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Systematic errors on curved microstructures caused by aberrations in confocal surface metrology

Published:2015-04-06 Issue:8 Volume:23 Page:9640
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Rahlves Maik,Roth Bernhard,Reithmeier Eduard

Funder

Deutsche Forschungsgemeinschaft

Open Access Publishing Fund of Leibniz Universität Hannover

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference14 articles.

1. Characterization of surface topography by confocal microscopy: I. Principles and the measurement system

2. Signal evaluation for high-speed confocal measurements

3. Improved signal model for confocal sensors accounting for object depending artifacts

4. On the Limitations of the Confocal Scanning Optical Microscope as a Profilometer

5. Validity of the Debye approximation

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