Nonlinear error compensation algorithm for signal resolution of chromatic confocal measurements
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Reference24 articles.
1. Chromatic confocal sensor-based on-machine measurement for microstructured optical surfaces featuring a self-aligned spiral center;Zhou;Opt. Express,2023
2. Dynamic pressure surface deformation measurement based on a chromatic confocal sensor;Zhao;Appl. Opt.,2023
3. Precision measurement of complex optics using a scanning-point multiwavelength interferometer operating in the visible domain;Wendel;Nanomanuf. Metrol.,2023
4. Confocal signal evaluation algorithms for surface metrology: uncertainty and numerical efficiency;Rahlves;Appl. Opt.,2017
5. Asymmetry robust centroid localization in confocal microscopy;Chen;Opt. Lett.,2022
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