Nonlinear error compensation algorithm for signal resolution of chromatic confocal measurements
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Reference24 articles.
1. Chromatic confocal sensor-based on-machine measurement for microstructured optical surfaces featuring a self-aligned spiral center;Zhou;Opt. Express,2023
2. Dynamic pressure surface deformation measurement based on a chromatic confocal sensor;Zhao;Appl. Opt.,2023
3. Precision measurement of complex optics using a scanning-point multiwavelength interferometer operating in the visible domain;Wendel;Nanomanuf. Metrol.,2023
4. Confocal signal evaluation algorithms for surface metrology: uncertainty and numerical efficiency;Rahlves;Appl. Opt.,2017
5. Asymmetry robust centroid localization in confocal microscopy;Chen;Opt. Lett.,2022
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Enhancing precision in line-scan chromatic confocal sensors through bimodal signal pattern;Optics & Laser Technology;2025-01
2. Enhancing precision of chromatic confocal measurement through linear interpolation based centroid algorithm;Surface Topography: Metrology and Properties;2024-08-06
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