Affiliation:
1. Harbin Institute of Technology
2. The Institute of High Energy Physics of the Chinese Academy of Sciences
3. Xi’an Institute of Optics and Precision Mechanics of the Chinese Academy of Sciences
Abstract
The electroforming replication process has been widely used in the
fabrication of nested x-ray telescopes. The imaging performance of the
mirrors is determined largely by the shape accuracy of the mandrels.
To predict the imaging performance of mirrors replicated from mandrels
with different parameter and fabrication errors, a special Monte Carlo
ray tracing model is established and verified by experiments. Then,
based on ray tracing numerical calculation, the influence of each
major fabrication error is discussed. Furthermore, according to the
results obtained by the simulation of slope error, a method for
evaluating the relationship between the mandrel full-band errors and
imaging quality is proposed and then verified by experiments. The
results show that the power spectral density (PSD) reference given by
the method can well reflect the quality of the mandrels, and guide the
fabrication process.
Funder
Chinese Academy of Sciences
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Cited by
4 articles.
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