Silicon ring resonators with a free spectral range robust to fabrication variations
Author:
Funder
Nederlandse Organisatie voor Wetenschappelijk Onderzoek
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference18 articles.
1. Layout-Aware Variability Analysis, Yield Prediction, and Optimization in Photonic Integrated Circuits
2. Performance prediction for silicon photonics integrated circuits with layout-dependent correlated manufacturing variability
3. Accurate extraction of fabricated geometry using optical measurement
4. Silicon Photonics Circuit Design: Methods, Tools and Challenges
5. Maximizing Fabrication and Thermal Tolerances of All-Silicon FIR Wavelength Filters
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