Carbon-rich amorphous silicon carbide and silicon carbonitride films for silicon-based photoelectric devices and optical elements: Application from UV to mid-IR spectral range-Reference-Cited by-同舟云学术

Carbon-rich amorphous silicon carbide and silicon carbonitride films for silicon-based photoelectric devices and optical elements: Application from UV to mid-IR spectral range

Published:2020-08 Issue: Volume:106 Page:109959
ISSN:0925-3467
Container-title:Optical Materials
language:en
Short-container-title:Optical Materials

Author:

Sha Bo,Lukianov Anatolii N.,Dusheiko Mykhailo G.,Lozinskii Volodymyr B.,Klyui Andriy N.,Korbutyak Dmytro V.,Pritchin Sergey E.,Klyui NickolaiI.

Funder

Thousand Talents Plan of Bureau of Foreign Experts Affairs

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials,Inorganic Chemistry,Organic Chemistry,Physical and Theoretical Chemistry,Spectroscopy

Reference39 articles.

1. Antireflection coatings for germanium and silicon in the infrared;Cox;J. Opt. Soc. Am.,1958

2. Antireflection structures for silicon coupling lens in near-infrared region using AlOx/TiOx bilayer grown by atomic layer deposition;Kim,2018

3. Antireflection coatings for silicon in the 25-50 μm region;Sherman;Appl. Optic.,1971

4. Formation of antireflection structures for silicon in near-infrared region using AlOx/TiOx bilayer and SiNx single-layer;Kim;J. Non-Cryst. Solids,2018

5. Crystalline Si thin-film solar cells : a review;Bergmann;Appl. Phys. Mater. Sci. Process,1999

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication and Tribological Properties of Diamond-like Carbon Film with Cr Doping by High-Power Impulse Magnetron Sputtering;Coatings;2024-07-22

2. Rapid graphene oxide assisted chemical etching of silicon in HF/H₂O₂ solution;Physica Scripta;2024-07-04

3. 1,4-Bis(trimethylsilyl)piperazine—Thermal Properties and Application as CVD Precursor;Coatings;2023-06-05

4. Stable a-CSi:H films with a wide range of modulus of elasticity and low internal stress;Surface and Coatings Technology;2023-04

5. Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture;Coatings;2023-01-30