Characterization of TiN thin films grown by low-frequency (60Hz) plasma enhanced chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference20 articles.
1. Diffusion barriers in thin films;Nicolet;Thin Solid Films,1978
2. Electrical properties of Ti/TiN films prepared by chemical vapor deposition and their applications in submicron structures as contact and barrier materials;Hu;Thin Solid Films,1997
3. Structure and properties of TiN coatings;Sundgren;Thin Solid Films,1985
4. TiO2/TiN/TiO2 heat mirror by laser ablation of single TiN target;Kawasaki;J. Phys.: Conf. Ser,2008
5. Durable TiN/TiNx metallic contacts for solar cells;Matenoglou;Thin Solid Films,2006
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Review of Plasma Processing for Polymers and Bio-Materials Using a Commercial Frequency (50/60 Hz)-Generated Discharge;Polymers;2023-06-28
2. TiN–LiAlSiO4 powders for hydrogen production under simulated solar light and their relationship between photocatalytic activity and the coefficient of thermal expansion;Materials Science in Semiconductor Processing;2022-06
3. Development of neural network potential for MD simulation and its application to TiN;Computational Materials Science;2022-04
4. Direct growth of high quality graphene nanowalls on dielectric surfaces by plasma-enhanced chemical vapor deposition for photo detection;Optical Materials Express;2020-10-19
5. Predicted crystal structures of titanium nitrides at high pressures;Computational Materials Science;2020-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3