MEMS Structures for On-chip Testing of Mechanical and Surface Properties of Thin Films-Reference-Cited by-同舟云学术

MEMS Structures for On-chip Testing of Mechanical and Surface Properties of Thin Films

Published:2003 Issue: Volume: Page:325-356
ISSN:
Container-title:Comprehensive Structural Integrity
language:
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Author:

Ballarini R.,Kahn H.,Heuer A.H.,De Boer M.P.,Dugger M.T.

Publisher

Elsevier

Reference117 articles.

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