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Modeling of Probabilistic Failure of Polycrystalline Silicon MEMS Structures

  • Published:2015-05-22 Issue:6 Volume:98 Page:1685-1697
  • ISSN:0002-7820
  • Container-title:Journal of the American Ceramic Society
  • language:en
  • Short-container-title:J. Am. Ceram. Soc.

Author:

Le Jia-Liang1,Ballarini Roberto2,Zhu Zhiren1

Affiliation:

1. Department of Civil, Environmental, and Geo- Engineering; University of Minnesota; Minneapolis Minnesota

2. Department of Civil and Environmental Engineering; University of Houston; Houston Texas

Funder

U.S. National Science Foundation

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Reference42 articles.

1. Design Rules for a Reliable Surface Micromachined IC Sensor;Bart;Annual Proc. IEEE Reliability Phys,1995

2. Lifetime Estimates and Unique Failure Mechanisms of the Digital Micromirror Device (DMD);Douglass;Annual Proc. IEEE Reliability Phys,1998

3. An Argument for Proof Testing Brittle Microsystems in High-Reliability Applications;Boyce;J. Micromech. Microeng,2008

4. A Reassessment of Materials Issues in Microelectromechanical Systems (MEMS);Jiang;J. Indian Inst. Sci,2007

5. R. Ballarini Contributive Research & Development Volume 130: The Role of Mechanics in Microelectromechanical Systems (MEMS) Technology 1998

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