Modeling of Probabilistic Failure of Polycrystalline Silicon MEMS Structures-Reference-Cited by-同舟云学术

Modeling of Probabilistic Failure of Polycrystalline Silicon MEMS Structures

Author:

Le Jia-Liang¹,Ballarini Roberto²,Zhu Zhiren¹

Affiliation:

1. Department of Civil, Environmental, and Geo- Engineering; University of Minnesota; Minneapolis Minnesota

2. Department of Civil and Environmental Engineering; University of Houston; Houston Texas

Funder

U.S. National Science Foundation

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

Reference42 articles.

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4. A Reassessment of Materials Issues in Microelectromechanical Systems (MEMS);Jiang;J. Indian Inst. Sci,2007

5. R. Ballarini Contributive Research & Development Volume 130: The Role of Mechanics in Microelectromechanical Systems (MEMS) Technology 1998

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