Effect of periods on wear performance of TiN/AlN superlattice films
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference23 articles.
1. Crystal growth and microstructure of polycrystalline Ti1−xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering
2. Study on d.c. magnetron sputter deposition of titanium aluminium nitride thin films: effect of aluminium content on coating
3. Structure and properties of TiN coatings
4. B.Y. Hshue, Ph.D. dissertation, Department of Materials and Engineering, NCKU Taiwan, 1996.
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