Surface properties and microstructure of implanted TiN films using MEVVA ion source
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference14 articles.
1. Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering
2. Surface modification of titanium by nitrogen ion implantation
3. Changes in the structure and properties of TiN coatings irradiated with Ti ions of moderate energies
4. Changes in friction characteristics and microstructure of steel by ion implantation of titanium and additional carbon in various doses (I)
5. Modification of metallic materials and hard coatings using metal ion implantation
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1. Influence of dual Mo and Ru ion implantation on the characteristics of commercial TiN-TiAlN-coated WC-10wt%Co-0.5wt%Cr3C2 face milling inserts;Surface and Coatings Technology;2024-01
2. Evaluation of titanium nitride/titanium aluminum nitride thin film coating, plasma nitriding on AISI 304 stainless steel using the plasma-assisted physical vapor deposition process, and thermal stress investigated through finite-element analysis;Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering;2022-11-25
3. Effect of Low-Energy Nitrogen Ion Implantation on Friction and Wear Properties of Ion-Plated TiC Coating;Coatings;2021-06-29
4. Fabrication and Performance of Ti/Al/Ni/TiN Au-Free Ohmic Contacts for Undoped AlGaN/GaN HEMT;IEEE Transactions on Electron Devices;2020-05
5. Enhancement of the Wear Resistance of Tungsten Cobalt Carbide Plates Using Ion Implantation and Al–Si–N Coatings;Springer Proceedings in Physics;2020
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