Low energy ion beam transport through apertures
Author:
Publisher
Elsevier BV
Subject
General Medicine
Reference17 articles.
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5. Implications in the use of secondary ion mass spectrometry to investigate impurity concentration profiles in solids
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1. Mass resolved low-energy ion backscattering spectrometry at target-to-projectile mass ratios near unity;Surface Science;1996-01
2. Small-area depth profiling in a quadrupole based SIMS instrument;International Journal of Mass Spectrometry and Ion Processes;1995-05
3. Surface and depth analysis based on sputtering;Topics in Applied Physics;1991
4. Significantly extended analytical potential of Rutherford backscattering spectrometry byinsitucombination with low‐energy sputtering;Applied Physics Letters;1988-10-31
5. Secondary ion emission and sputter yields from metal targets under fluorine ion (F2+) bombardment;Analytical Chemistry;1988-07-15
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