Influence of Source Parameters on the Properties of an Ion Beam
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Published:1973-11
Issue:6
Volume:10
Page:918-921
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Wittmaack K.,Schulz F.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
9 articles.
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