Low yield sputtering of monocrystalline metals
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Published:1980-03
Issue:1-3
Volume:170
Page:341-346
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ISSN:0029-554X
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Container-title:Nuclear Instruments and Methods
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language:en
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Short-container-title:Nuclear Instruments and Methods
Author:
van Veen A.,Fluit J.M.
Reference11 articles.
1. Tokamak reactors for breakeven;Behrisch,1977
2. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
3. Inelastic ion-surface collisions;Sigmund,1977
Cited by
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