Comparative studies of Mg implants in GaAs in different annealing environments
Author:
Publisher
Elsevier BV
Subject
General Medicine
Reference11 articles.
1. Electrical profiling and optical activation studies of Be‐implanted GaAs
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5. Ion implantation in semiconductors;Zölch,1977
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Ion Implantation in Iii–V Semiconductors;Materials Processing: Theory and Practices;1989
2. Ionized Mg doping in molecular‐beam epitaxy of GaAs;Journal of Applied Physics;1986-02-15
3. GaAs Material Preparation and Characterization;GaAs Microelectronics;1985
4. Incoherent light annealing of Mg implanted GaAs;Radiation Effects;1985-01
5. Ion implantation and diffusion of Zn in GaAs;Journal of Applied Physics;1984-01-15
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